A large-stroke electrostatic micro-actuator
نویسندگان
چکیده
منابع مشابه
A small-gap electrostatic micro-actuator for large deflections
Common quasi-static electrostatic micro actuators have significant limitations in deflection due to electrode separation and unstable drive regions. State-of-the-art electrostatic actuators achieve maximum deflections of approximately one third of the electrode separation. Large electrode separation and high driving voltages are normally required to achieve large actuator movements. Here we rep...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2011
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/21/7/075023